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As the cost of a complete mask set has dramatically increased and now represents a significant part of the overall project cost, it is critical for design teams, mask data preparation teams, and mask shops to implement a robust and repeatable Mask Data Preparation flow, which increases the productivity of mask set creation and removes any risk of error.

XYALIS offers a suite of tightly integrated state-of-the-art Mask Data Preparation modules that automate the repetitive and time consuming tasks between design and fracturing:

  • Generation of Multi Project Wafers (MPWs) or shuttles with GTmuch, an automated placement tool dedicated to maximizing silicon usage and minimizing saw lines when assembling heterogeneous chips,
  • Generation of complex reticules with GTframe, an automated tool for inserting manufacturing items between chips and inside scribe lines, according to reusable process rules,
  • Intuitive mask set creation with GTmask, supporting Multi-Layer Reticles (MLRs), optimized 1X flow, and wafer map optimization.
  • and GTmodus for Masks Projects Management

 

Built around a powerful dedicated graphical editor and a shared data format, XYALIS Mask Data Preparation solution handles standard layout and job deck formats: GDSII, OASIS, MEBES. Each module can be run through the common graphical user interface or on the command line for automatic processing and easy inclusion in an existing flow.

Xyalis integrated MDP solution



GTmuch

Multi Chip Assembly editor

  • Full flow automation and checks
  • Fast complex chip assembly
  • Sawing-line ...

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GTframe

Frame assembly editor

  • Reusable frame description file
  • Automated item placement
  • Field ...

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GTmask

Mask Set Editor

  • Automated field placement with reusable template
  • Support Multi-Layer ...

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GTmodus

Masks Projects Management

  • Enterprise wide photomask information repository
  • Mask Data Preparation ...

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SmartMRC

Mask Rule Checker

  • Full mask pattern verification
  • OPC verification
  • Data comparison ...

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